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Xe-Ar-Ne
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Kr-Ne
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15%O2-Ar
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4%H2-N2
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1%PH3-H2
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20%F2-N2
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10%SiH4-N2
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客製化
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N2O
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CO2
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HCl
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He(Helium)
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NH3
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SF6
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Ar
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BDR-400
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C3F8
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C4F8
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CF4
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CHF3
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N2
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NF3
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NO
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O2
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PH3
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SiH4
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